武漢納佰新電子有限公司

To become a leading supplier of critical semiconductor consumables.

We specialize in providing in-situ cleaning solutions for every stage of chip development and production.

Services Market

We deliver a comprehensive portfolio of cleaning solutions for semiconductor manufacturing and testing, serving a full spectrum of facilities such as Logic, Memory, and CIS wafer fabs, mask shops, panel plants, and OEMs.

3D NAND
DRAM
HBM
LOGIC

Application Scenario

Chuck Clean Solutions

Particulate contamination of wafer handling subsystems (chucks) is a prevalent and time-consuming challenge in semiconductor fabrication. Nanoval has introduced a full suite of in-situ cleaning solutions specifically designed for chucks in a wide range of tools, such as PVD, Etch, Lithography, and high-temperature CVD systems.

Working Principle of Chuck Cleaning

To address particulate contamination on equipment chucks, Nanoval has developed a comprehensive suite of in-situ cleaning solutions. Our product catalog includes:

SPM: Designed for contaminant removal on high-temperature electrostatic chucks (ESCs).
PPM: Targets contamination on vacuum chucks and lithography tool chucks.
PPM/APM: Formulated for cleaning ultra-high-temperature electrostatic chucks.

Photomask Table Cleaning

Leveraging a proprietary formula and a custom process design, Nanoval's solution is tailored specifically for eliminating contaminants on photomask pods.

Probe

Contamination introduced by probes in different test scenarios

Test Equipment

WAT
Probe Card

CP
Prober Clean

FT

Widerange Product Portfolio

Nanoval has developed a range of cleaning products dedicated to yield improvement.

Probe Conditioning Products

Work Scenario: Probe Tip Cleaning
Type: Wafer/Sandpaper
Abrasion: Adjustable
Probe Cleaning Products

Work Scenario: Probe Side Cleaning
Type: Wafer/Sandpaper
Abrasion: Adjustable
Combined Probe Conditioning and Cleaning Kit

Work Scenario: : Probe Tip & Side Cleaning
Type: Left/Right Version (A/B)
Abrasion: Adjustable
Combined Probe Conditioning and Cleaning Kit

Work Scenario: Probe Tip & Side Cleaning
Type: Vertical Structure
Abrasion: Adjustable
Probe Card Maintenance Products

Work Scenario: Probe Side Cleaning, Probe Card Temperature Maintenance
Type: Wafer / Sandpaper

CONTACT

Mobile：13407129177

QQ：13407129177

Email：admin@nanonoval.com

Wechat Channel：納佰新

Address：Room 402, Building 31DE Future Port,BaishazhouHongshan District,Wuhan CiteHubei Province, China